It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process.
传感器采用pn结自停止腐蚀和粘结剂键合的方式制造,制造过程仅需三块掩模板。
CopyRight © 2020-2024 优校网[www.youxiaow.com]版权所有 All Rights Reserved. ICP备案号:浙ICP备2024058711号