Measurement of Residual Stress of MEMS Materials;
微型机械材料的残余应力测量
MEMS is a developing research project which based on microelectrical technology and traditional mechanics.
微型机械是在微电子工艺和传统机械学的基础上发展起来的多学科交叉的前沿研究领域。
Research into an Optical and Mechanical System of the Instrument for Measuring Dynamics of Micromechanism;
微型机械运动参数测试仪光学机械系统研究
Micromechanism and Their Related Theory and Technology;
微型机械及相关理论和技术
In case of existing the disparity between our country and the advanced countries on developing micromechanism research, it possesses some realism meaning and science learning for us how to unite our practise to explore the developmental direction and the innovative approcach of our country s micromechanism.
微型机械将是 2 1世纪高新技术发展的推进器和增长点。
The application study of ER techenologies to micromachines;
电流变技术在微型机械系统中的应用研究
It also presents the key technology in nanometer scale machining and the application in micromachine and MEMS.
讨论了纳米加工与常规精加工的区别,介绍了纳米加工的关键技术及其在微型机械和微型机电系统的应用。
It states that because of the inevitable tend for the industrialization of micromachine, it is both necessary and feasible for China to develop the industry of micromachine.
微型机械是在微电子工艺的基础上发展起来的多学科交叉的前沿研究领域,具有广阔的应用前景。
The nano meter technology and micro machine are considered as the core technology of the 21st century.
纳米技术及微型机械被认为是21世纪的核心技术。
From the practical use of micro machine and compared with the design method of tradition machine, the paper calculated and analyzed the stress on the bottom of micro gears teeth with the aid of the FEM and its related analytic software.
从微型机械的实际应用出发 ,对比传统机械的设计方法 ,应用有限元理论及其相关分析软件 ,对微型齿轮的齿根弯曲应力进行计算及分析 ,并对分析结果进行图像处理 ,可视化地观察齿轮有限元分析单元的应力状况、位移变化 ,从而方便且清晰地寻找最大应力单元、判断微型齿轮受载状况。
In this paper, the advance of MD simulation for mechanical behavior of micro machine is introduced.
介绍了国外分子动力学模拟在微型机械力学行为分析中的研究进展 ;阐述了分子动力学模拟的基本方程、分子动力学的算法以及应用于微型机械力学行为分析中的势函数等。
Micro mechanism has a super little shape and characteristics of least influence from factors such as heat swell, noise and wind, working stably at high speed,low energy waste, little inertia, high resonance frequency, short response time, no delay, saving materials and low costs.
微型机械具有体形超小,受热胀、噪声和挠曲等影响甚微,高速工作稳定,能耗低,惯性小,谐振频率高,响应时间短,无延迟,节约材料、成本低等特点,可用蚀刻工艺制作,适宜大批量生产。
micro-mechanized engineering data
微型机械化工程数据
Discussion of some theoretical problems of MEMS design
微型机械设计中某些理论问题的探讨
the micro-tribology in magnetic recording system and micro-machinery as well as nanometer materials tribology ;
磁记录和微型机械的微观摩擦学及纳米级材料摩擦学;
A Small World Grows Tinier Micromachines may be the next industrial wave
世界在缩微——微型机械可能成为下一个工业冲击波
Mechanical structure design of minityped explosive and danger disposal robot
微型排爆排险机器人的机械结构设计
Study on Mems Technology Based Electro-Magnetic Planar Micromotor;
基于微机械工艺的电磁型平面微电机的研究
Study on a New Electromagnetic Micromotor in Micro Electronic Mechanical System;
微电子机械系统中新型电磁微电机的研究
Design and Fabrication of a Novel MEMS Silicon Spring
一种新型微机械硅弹簧的设计与制作
Research on Golay-cell Type of Uncooled Infrared Detector Based on MEMS;
微机械Golay腔型非制冷红外探测器研究
New design methods application on microminiature agricultural machinery product
微小型农业机械产品设计新方法应用
Design and analysis of novel RF MEMS switches with coplanar waveguide based on cavity structure
一种新型腔体式共面波导型微机械射频开关
Designing Micro and Small Compliant Mechanism Using Topology Optimization;
微型及小型柔性机械结构的拓扑优化设计方法
An improved GM-AR model for a micromechanical gyroscope's nonstationary random signals
微机械陀螺非平稳随机信号改进GM-AR模型研究
Mechanical properties of MEMS film resonator analyzed by equivalent model
等效模型分析微机械薄膜谐振器的力学特性
Properties of Excimer Laser Etching of Typical MEMS Materials
典型微机械材料的准分子激光加工特性
Features and Applications of 3031 Accelerometer
微机械3031型加速度传感器特点分析及应用
Principle and Design of an IR Detector for a Novel Room Temperature MEMS
新型室温微机械红外探测器原理与设计
Identification of Static Model of Multi-finger Micromechanical Accelerometer
梳齿式微机械加速度计静态模型的辨识
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